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Size |
1/2″, 3/4″ |
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Cv Value |
3.5 |
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Max. Working Pressure (G.) |
1.5MPa |
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Operating Pressure (G.) |
0.5~0.7MPa |
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Max. Working Temp. |
-10℃ ~ 65℃ |
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Internal Leakage Allowance (He) |
1x10-10 Pa · ㎥/s |
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Test Pressure ≤ 1×10-2 Torr | |
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Holding Time ≥ 15 sec. | |
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External Leakage Allowance (He) |
1x10-10 Pa · ㎥/s |
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Test Pressure ≤ 1×10-2 Torr | |
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Holding Time ≥ 1 min. | |
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Particle Inspection (EP only) |
No count |
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Pressure : 60~80psi N2 Gas | |
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Sample Volume : 1CFM | |
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0.1㎛ and Larger |