美國MKS真空閥628D.1TBF1B溫度調節電容壓力計

The E28H temperature regulated capacitance manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. The E28H Baratron? manometer is temperature controlled to 100°C, accurate to 0.25 of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability.

Temperature controlled to 100°C for up to 0.25 of reading accuracy
0 to 10 VDC analog output proportional to absolute pressure
Etch baffle sensor significantly reduces the ability of byproducts to reach the sensor
Full Scale ranges low as 50 mTorr for precise low pressure measurement
All Inconel? sensor-corrosion resistant wetted surfaces